NANO-POLISHING SUBSTRATES FOR OPTICS AND MICROELECTRONICS

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چکیده

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ژورنال

عنوان ژورنال: Journal of Mechanical Engineering the National Technical University of Ukraine "Kyiv Polytechnic Institute"

سال: 2016

ISSN: 2409-5966,2305-9001

DOI: 10.20535/2305-9001.2016.76.67243